• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
  • 同族专利
  • 引用文献
  • 法律状态
  • 优先权
    • 专利摘要:
    The lifting movement of an armature of an electromagnet is braked by means of a gas which flows out under pressure between the abutment faces of a core of the electromagnet and the armature so that the gas is compressed therebetween and discharged in the outer atmosphere.
    公开号:SU1015448A1
    申请号:SU797770575
    申请日:1979-05-16
    公开日:1983-04-30
    发明作者:Риссланд Эберхард；Крюгер Карл-Хейнц
    申请人:Феб Электромат Им.Феб Комбинат Микроэлектроник (Инопредприятие)；
    IPC主号:
    专利说明:

    2. A vibration-free lifting device according to claim 1, characterized in that between the intermediate space 18, a limited area of 10 and the contact area 16, and / or the intermediate space 19, a limited area of 12 and areas of contact 17, and the outer space are narrow channels .
    3. A vibration-free lifting device, characterized in that the cross-section of the narrow channels 20 depends on the position of the lifting box.
    4. A vibration-free lifting device according to claims 1 and 2, characterized in that the cross section of the narrow channels 20 is adjusted by means of a throttling body 21.
    5. A vibration-free lifting device pop1, characterized in that the areas 10, 12 and / or the SURFACE / 1I contact areas 16, 17 are divided into magnetizable zones 22 and non-magnetisable zones 23.
    B. A vibration-free lifting device in accordance with claim 1, characterized by the fact that magnetic circuit, 26, relates to lifting bar 2.
    7. A vibration-free lifting device in accordance with claims 1 and 6, characterized in that the return spring 28 is opposed to the action of the magnetic circuit 27 and is located between the lifting wheel 2 and the core 1,
    8. The vibration-free lifting device according to claim 1, characterized in that two magnetic circuits 7, 8 relate to the lifting bar 2.
    9. A vibration-free lifting device according to Claims 8 and 8, characterized in that the magnetic circuits 7, 8 are connected via the reverse-circuit pole 6.
    10. A vibration-free lifting device in accordance with Claims 1, 8 and 9, characterized in that the reverse-circuit pole 6 is a permanent magnet 24.
    one
    The invention relates to a vibration-free lifting device, preferably for semiconductor wafers in automatic manipulators, allowing for rapid movement of the ascent in sensitive systems.
    DD-WP 101 783 describes a lifting device for fast and vibration-free contact, in which the measles are held in two membrane springs that counteract the tractive characteristic of the electromagnet due to the steeper characteristic of the spring. In this case, the spring constant is adjusted by means of variable precompression. This lifting device is limited in its application to relatively small forces, i.e. When l large semiconductor wafers can not realize a short rise time. The reasons for this should be sought in a large opposition of the progressively acting spring and the high power consumed by the winding of the magnet arising from this.
    In US-PS 3 939 743, a clamping head is described, which is driven by a gage driven by a stepper electrode; the clown implements the lifting movement.
    The disadvantage of the device is friction between its separate parts.
    causing mechanical wear in these places, as well as the fact that the clamping head consists of several separate parts, as a result of which the parallel direction of the clamping surface in the working position is difficult.
    The purpose of the invention is to create a vibration-free lifting device for increasing the diameter of the plates, having a simple mechanical structure, not subject to carrying, for which the power loss of the actuator is reduced so that there is no need for additional measures for heat dissipation.
    The object of the invention is to gently brake the movement of the core before reaching the end positions with the help of gas, mainly air, which is released under pressure between the contact areas of the core and the lifting crust, as a result of which the air between the contact areas is compressed The device goes into the external space.
    The invention relates to a vibration-free lifting device, in which the clamping head mounted on the lifting bark is moved in a vertical direction between two end positions using one or several electromagnets.
    At the same time, lifting measles contains a guide connected to a ferromagnetic core. In this guide there are evenly distributed nozzles. The upper area of the ferromagnetic core is the first contact area of the lift core, and the second area is the second contact area. In this or several areas of the ferromagnetic core or lifting core evenly one other nozzles are placed. From the nozzles under pressure out the gas, mainly air. There is a first intermediate space between the upper core area and the first contact area of the lifting core, and a second intermediate space between the lower area and the second area, and narrow channels are located as the junction between the intermediate spaces and the outer space. The cross section of these narrow channels depends on the position of the lifting bar. In addition, the cross-section of narrow channels can be adjusted; .. throttling body. Under appropriate circumstances, narrow channels can be formed directly by intermediate spaces.
    When the lifting bar moves to one of the two end positions, the air in the corresponding intermediate space is compressed and causes severe braking. Narrow channels, whose cross-section is adjustable, serves to suppress oscillations of the lifting bar on the air cushion.
    The areas of contact and / or the lower and upper areas are divided into magnetizable and non-magnetizable zones. By this, the relationship between the forces of attraction and damping is consistent.
    The lifting device contains one or two electromagnets. In the version with one electromagnet, if necessary, a linear or non-linear return spring is located between the lifting bar and the core, which counteracts the action of the magnetic circuit related to the electromagnet.
    If each of the two end positions includes one electromagnet and, that sadmm, one magnetic circuit, then both magnetic circuits can be connected via a common reverse-circuit pole. This reverse pole circuit contains a permanent magnet, which can also be made up of segments.
    A permanent magnet eliminates losses when the lifting device is stopped, since only an electrical switching pulse is required to move the lift core.
    An embodiment of the invention.
    FIG. 1 shows a vibration-free lifting device, the section in FIG. 2 - location chokes -. the ruling body in relation to the regulation of the cross section of narrow channels; FIG. 3 shows the division of areas into magnetized and nonmagnetized zones; in fig. 4 - lifting device with one electromagnet.
    The vibration-free lifting device for semiconducting plates (Fig. 1) has a symmetrical design of the body of rotation and consists of a ferromagnetic core 1. Core 1 is surrounded by a lifting crust 2. Lifting bar 2, in turn, is surrounded by a guide 3. Core 1 vl It is supported by two electromagnets 4, 5 separated by a reverse-circuit pole 6 connected to the core. Magnetic circuit 7 relates to the upper electromagnet 4, and magnetic circuit 8 to the lower electromagnet 5.
    In the guide 3, evenly distributed nozzles 9 are located. The upper area 10 of the core 1 includes the first contact area
    16 lifting the core 2, and to the lower area 12 - the second contact area 17. In the upper area 10 there are nozzles, and in the lower area 12 - nozzles 13. Nozzles 9, 11, 13 are connected through a system of channels 14
    with clutch 15. The area 10 and the area of contact 16 limits the intermediate space 18, -a area 12 and the area of contact between
    17 is an intermediate space 19. Intermediate spaces 18,19 are connected to the outer space by narrow channels 20. In this case, the cross section of narrow channels 20 depends on the position of the lifting core 2 or throttling organs 21 are provided (Fig. 2).
    Areas 10, 12 and / or contact areas 16, 17 can be divided into magnetizable zones 22 and non-magnetizable zones 23. In addition, the pole of the reverse tongue 6 contains a permanent magnet 24 composed of segments. A clamping table 25 is located on the lifting cortex 2. .
    Outlet openings 26 are located in the guide 3, complementing the connection of the intermediate space 19 and the narrow channels 20 with the outer space, latches to prevent accidental rotation of the lifting bar 2 relative to the guide 3 and, thus, to the core 1.
    FIG. 4 shows a lifting device in which only one magnetic circuit 27 belongs to the core 1 and the lifting edge 2. In this case, a return spring 28 is fastened between the core 1 and the lifting fork 2, / counteracting the action of the magnetic chain. The return spring 28. has a linear or non-linear characteristic. When the lifting bar 2 moves, the air in the intermediate space 18 or 19 is compressed and slowly goes out into the outer space. To set the required attenuation, the cross section of the narrow 2p channels should be changed. In addition, the separation into magnetizable 22 and non-magnetizable 23 zones also serves to set the desired power ratios and to provide a damped braking process. It is recognized as an invention according to the results of the examination carried out by the Office for: the invention of the German Democratic Republic.
    权利要求:
    Claims (10)
    [1]
    1. NON-VIBRATION LIFTING DEVICE for semiconductor wafers, in which, using one or more electromagnets, the clamping head mounted on the lifting anchor moves vertically between two end positions, characterized in that the lifting anchor is equipped with a ferromagnetic core 1 and guide 3, in guide 3 there are uniformly distributed nozzles 9, the first contact area 16 of the lifting armature 2 belongs to the upper area 10 of the ferromagnetic core 1, and to the lower area 12 the second contact area 17, in one or more areas 10, 12 and / or contact areas 16, 17 evenly distributed nozzles 11, 13 and nozzles 11, 13 and nozzles 9 under pressure ^ gas comes out.
    I.,. 1015448 and GoWit15 1 'I'm 19 Ψαδ. I
    [2]
    2. Vibration-free lifting device according to π. 1, characterized in that between the intermediate space 18, a limited area of 10 and a contact area 16, and / or the intermediate space 19, a limited area of 12 and a contact area 17, and the outer space are narrow channels.
    [3]
    3. Vibration-free lifting device according to claims 1 and 2, characterized in that the cross section of the narrow channels 20 depends on the position of the lifting armature.
    [4]
    4. Vibration-free lifting device according to claims 1 and 2, characterized in that the cross section of the narrow channels 20 is regulated by means of a throttling body 21.
    [5]
    5. Non-vibration lifting device according to π 1, characterized in that the areas 10, 12 and / or the contact area 16, 17 are divided into magnetizable zones 22 and non-magnetizable zones 23.
    [6]
    6. Vibration-free lifting device pop. 1, distinguished by the fact that the magnetic chain 26 belongs to the lifting anchor 2.
    [7]
    7. Vibration-free lifting device according to claims 1 and 6, characterized in that, the action of the magnetic circuit 27 is counteracted by a return spring 28 located between the lifting armature 2 and the core 1. '·
    [8]
    8. Vibration-free lifting device pop. 1, characterized in that the lifting armature 2 includes two magnetic circuits 7, 8.
    [9]
    9. Vibration-free lifting device according to PP-G and 8, characterized in that the magnetic circuits Ί, 8 are connected. Through the pole of the reverse circuit 6.
    [10]
    10. Vibration-free lifting device according to claims 1, 8 and 9, characterized in that the pole of the reverse circuit 6 is a permanent magnet 24.
    类似技术:
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    GB1408685A|1975-10-01|Electromagnets
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    JPS56122108A|1981-09-25|Electromagnetic driving device
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    SU380902A1|1973-05-15|ELECTROMAGNETIC DRIVE OF VALVE
    GB1088771A|1967-10-25|Electromagnet
    JPH0482058A|1992-03-16|Optical head driving device
    JPS62194040A|1987-08-26|Electromagnetic brake
    JPS6417225A|1989-01-20|Objective lens driving device
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    同族专利:
    公开号 | 公开日
    SE7904779L|1979-12-02|
    SE442464B|1985-12-23|
    DD137037A1|1979-08-08|
    CH642476A5|1984-04-13|
    DD137037B1|1980-07-23|
    HU182647B|1984-02-28|
    FR2427171A1|1979-12-28|
    FR2427171B3|1982-05-07|
    GB2022322A|1979-12-12|
    BG32235A1|1982-06-15|
    US4270109A|1981-05-26|
    CS222966B1|1983-08-26|
    DE2920907A1|1979-12-20|
    GB2022322B|1982-11-10|
    JPS551198A|1980-01-07|
    引用文献:
    公开号 | 申请日 | 公开日 | 申请人 | 专利标题
    DE638721C|1936-11-21|Adolf Hanning|Electric pull and push magnet|
    DE1737087U|1953-07-11|1957-01-03|Magnetschultz Spezialfabrik Fu|ELECTRIC ACTUATION MAGNET WITH DAMPED ANCHOR MOTION.|
    DE1414815A1|1960-10-24|1968-10-03|List Dipl Ing Heinrich|Polarized double stroke magnet|
    CH452702A|1965-12-24|1968-03-15|Runtal Holding Co Sa|Actuating device with an electromagnet and adjustable hydraulic delay|
    DE1614049B2|1967-03-31|1971-10-21|Licentia Patent Verwaltungs GmbH, 6000 Frankfurt|ELECTROMAGNET FOR SWITCHING DEVICES|
    DD101783A1|1972-12-20|1973-11-12|
    US3936743A|1974-03-05|1976-02-03|Electroglas, Inc.|High speed precision chuck assembly|
    US3972505A|1975-04-04|1976-08-03|Skinner Precision Industries, Inc.|Control valve|DE3132919A1|1980-12-09|1982-09-02|VEB Zentrum für Forschung und Technologie Mikroelektronik, DDR 8080 Dresden|Servo-drive|
    JPH0220122B2|1981-05-01|1990-05-08|Ruukasu Redetsukusu Inc|
    DE3541272A1|1985-11-22|1987-05-27|Thomson Brandt Gmbh|MAGNETIC TAPE DEVICE|
    JPH01205438A|1988-10-12|1989-08-17|Hitachi Ltd|Magnetic-levitation-type transfer apparatus|
    US4975637A|1989-12-29|1990-12-04|International Business Machines Corporation|Method and apparatus for integrated circuit device testing|
    法律状态:
    优先权:
    申请号 | 申请日 | 专利标题
    DD20572278A|DD137037B1|1978-06-01|1978-06-01|BELL-FREE HUB DEVICE|
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